New Product: Transparent Object Inspection System WASAVI Series "TROIS33"

New Product: Transparent Object Inspection System WASAVI Series "TROIS33"

2011.11.21

Lasertec now commercializes a new inspection/review system, “WASAVI Series TROIS33”,specialized for inspection and analysis of transparent wafers and starts to accept orders for this new product in December this year.
* WASAVI: Wafer Surface Analyzing and Visualizing System

Description

Lasertec has commercialized a Transparent Wafer Inspection/Review System “TROIS33” that detects various kinds of defects of transparent wafers with high speed and observes those defects　 with high resolution based on a bright view confocal optics.

Under the circumstances that global energy conservation awareness rises, necessity for new technologies that elevate energy efficiency to its highest limit is intensifying. The practical realization technology for power electronics devices and also for the next generation power devices using new materials such as GaN (Gallium Nitride) and SiC (Silicon Carbide) is one of those new technologies and R&D activities for realization of stable mass production of these devices are rapidly progressing.

Lasertec commercialized a Transparent Object Inspection System “TROIS32”in 2010. In addition to high sensitivity inspection using the combination of confocal optics and differential interference optics, stable inspection not to be influenced by film interference even with hetero epitaxial structure was realized, which has been receiving high acclaim in the R&D field of LED and power devices. In view of such success, a new product “TROIS33” has been commercialized in the aim to respond to such needs that larger diameter wafers are to be inspected with higher inspection speed.

TROIS33 is a high speed and high sensitivity defect inspection/review system that satisfies needs for larger diameter wafers and their mass production while inheriting high sensitivity defect detection, high resolution review function and defect classification function of TROIS32. This new system is compatible with wafers of 8 inch diameter maximum and implements high speed inspection of 10 minutes per wafer (6 inch diameter wafer). This system has compatibility with automation requirement such as auto loader operation and CIM processing and is applicable to outgoing/incoming inspection and process monitoring in mass production processes.

Lasertec wishes to be useful to customers by presenting inspection systems that timely and quickly satisfy customers’ needs.

We await your inquiries.

Key Features

• Employment of confocal optics best suited for transparent wafer provides stable inspection by eliminating influence of reflection at substrate rear surface and so on
• Differential interference optics provides high sensitivity detection of various kinds of crystal defects including shallow scratch.
• A broad-band light source and optical filters are combined to provide a wavelength selection function, which eliminates influence of layer interference and so on for realizing optimum inspection condition for wafers and films to be inspected.
• A unique algorithm employed eliminates influence of surface morphology not originating to defects.
• Defect map display function, defect classification function and marking function are equipped to support defect analysis.

Applications

• Defect inspection of transparent wafers such as wide gap semiconductors, sapphire, quartz and so on.
• Defect inspection of wide-band-gap semiconductor in the form of epitaxial layer (homo-epi and hetero-epi).
• Management of epitaxial growth process and related equipments
• Development of abrasive compound and so on and also management of polishing process
• Defect inspection of patterns on transparent wafer

Product detail

Transparent Object Inspection System WASAVI Series TROIS33

High sensitivity defect inspection/review system that inspects GaN on Si and transparent wafers with high speed

Detail