Lasertec now commercializes a new inspection/review system, “WASAVI Series TROIS33”,specialized for inspection and analysis of transparent wafers and starts to accept orders for this new product in December this year.
* WASAVI: Wafer Surface Analyzing and Visualizing System
Lasertec has commercialized a Transparent Wafer Inspection/Review System “TROIS33” that detects various kinds of defects of transparent wafers with high speed and observes those defects with high resolution based on a bright view confocal optics.
Under the circumstances that global energy conservation awareness rises, necessity for new technologies that elevate energy efficiency to its highest limit is intensifying. The practical realization technology for power electronics devices and also for the next generation power devices using new materials such as GaN (Gallium Nitride) and SiC (Silicon Carbide) is one of those new technologies and R&D activities for realization of stable mass production of these devices are rapidly progressing.
Lasertec commercialized a Transparent Object Inspection System “TROIS32”in 2010. In addition to high sensitivity inspection using the combination of confocal optics and differential interference optics, stable inspection not to be influenced by film interference even with hetero epitaxial structure was realized, which has been receiving high acclaim in the R&D field of LED and power devices. In view of such success, a new product “TROIS33” has been commercialized in the aim to respond to such needs that larger diameter wafers are to be inspected with higher inspection speed.
TROIS33 is a high speed and high sensitivity defect inspection/review system that satisfies needs for larger diameter wafers and their mass production while inheriting high sensitivity defect detection, high resolution review function and defect classification function of TROIS32. This new system is compatible with wafers of 8 inch diameter maximum and implements high speed inspection of 10 minutes per wafer (6 inch diameter wafer). This system has compatibility with automation requirement such as auto loader operation and CIM processing and is applicable to outgoing/incoming inspection and process monitoring in mass production processes.
Lasertec wishes to be useful to customers by presenting inspection systems that timely and quickly satisfy customers’ needs.
We await your inquiries.
High sensitivity defect inspection/review system that inspects GaN on Si and transparent wafers with high speed