Lasertec announced CLIOS G821, a new inspection system designed specifically to detect defects in large-size photomasks of high-definition liquid crystal displays (HD LCDs). HD LCDs are widely used on smart phones, tablet computers and HDTVs.
Lasertec has launched CLIOS G821, a highly advanced successor to 51MD Large-size photomask Inspection System, which has been acclaimed as a de facto industry standard of inspection tools for the 8th generation large-size photomasks. Lasertec starts to accept purchase orders this month.
Because of the necessity to meet requirements of HD LCDs, the most notable application being smart phones, and the latest HDTV format 4K2K, the demand for more finely patterned photomasks is growing fast. As a result of this and the widespread application of half-toned and gray-toned photomasks, mask patterns used in LCD production are becoming more complex and advanced rapidly.
In this background, inspection tools with a much higher sensitivity are strongly desired so that pattern defects in advanced photomasks can be inspected.
In order to meet the new inspection needs, Lasertec has commercialized CLIOS G821. Featuring a newly-developed optics, stage mechanism and detection circuit, CLIOS G821 is capable of performing inspections with an enhanced sensitivity while maintaining high throughputs.
High senstitivity inspection of large-size photomasks with advanced patterns for high-definition LCDs